SMS Inc. offer a variety of high purity, low particulate generating coatings for semiconductor applications

  • Alumina
  • Yttria
  • Titaniumv
  • Aluminum
  • Silicon
  • Tantalum

Special coatings have also been optimized and are being currently in LED manufacturing equipment, these include high emissivity tungsten.

These coatings are applied via a variety of techniques including, thermal spray, CVD, PEO and hybrid CVD.